Treatment apparatus for treating a surface of a body

ABSTRACT

The invention relates to a treatment apparatus ( 1 ) for treating a surface ( 21 ) of a body ( 2 ) with a first treatment medium ( 31 ) and a second treatment medium ( 32 ). In this respect, the treatment apparatus ( 1 ) includes a holding device ( 5 ) rotatable about an axis of rotation ( 4 ) for receiving and holding the body ( 2 ) and a rotary drive ( 6 ) rotationally fixedly coupled to the rotatable holding device ( 5 ) as well as a supply device ( 7 ) for supplying the first treatment medium ( 31 ) and the second treatment medium ( 32 ) to the surface ( 21 ) of the body ( 2 ) held in the holding device ( 5 ). The treatment apparatus includes a collection container ( 8 ) having a separation element ( 80 ) which separation element ( 80 ) divides the collection container ( 8 ) into a first chamber ( 81 ) and into a second chamber ( 82 ) such that the first treatment medium ( 31 ) can be collected in the first chamber ( 81 ) and the second treatment medium ( 32 ) can be collected separately in the second chamber ( 82 ). In accordance with the invention, the collection container ( 8 ) includes a base chamber part ( 800 ) not movable with respect to the holding device ( 5 ) and the separation element ( 80 ) is movably arranged between a first position (A) and a second position (B) such that the first treatment medium ( 31 ) can be led off into the first chamber ( 81 ) in the first position (A) and the second treatment medium ( 32 ) can be led off into the second chamber ( 82 ) in the second position (B).

CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/045,437 filed Mar. 10, 2011, entitled “Treatment Apparatus forTreating a Surface of a Body,” which claims the priority of EuropeanApplication No. 10 158 604.8, filed on Mar. 31, 2010, the disclosures ofwhich are incorporated herein by reference.

BACKGROUND OF THE INVENTION

The invention relates to a treatment apparatus for treating a surface ofa body, in particular for treating a wafer in accordance with thepreamble of independent claim 1.

There is a need in a number of industrial processes, for example in themanufacture of semiconductors and chips, to provide specific surfaces ofsubstrates, for example wafers, for the manufacture of electroniccomponents with suspensions in a controlled manner to process theirsurfaces. Chemical-mechanical planarization processes (CMP, cleaningand/or corroding of wafers or the removal of photoresist to be removedusing solvents, also called polymer removal) are named as importantexamples here such as are used in the semiconductor industry. In suchprocesses, a suspension, usually called a slurry, of typically very finesolid particles and a liquid is applied to a rotating wafer and thereserves for the polishing or lapping of the very fine semiconductorstructures. Another example is the application of photoresist to thewafer or the roughening of surfaces of computer hard disks to prevent anadhesion of the writing/reading heads by adhesion forces, that is, forexample, by Van der Waals forces.

The surfaces must very frequently be processed with different liquids ina plurality of sequential worksteps. In the case of wafers forsemiconductor manufacture, they are, for example, mounted in the form ofvery thin disks in a process chamber on a rotatable holder which isdriven via a rotary axle by an electric motor which is located outsidethe process chamber. The thin wafer is set into a very fast rotation inthis manner and its surface has different treatment media, liquidtreatment media as a rule, applied to it successively.

It is common to all these worksteps that a specific quantity of thecorresponding treatment medium is applied to the rotating wafer from asuitable supply device, for example from a nozzle. The liquid is thentransported away completely or, as in the coating of the wafer, at leastpartly, to the outside beyond the margin of the wafer, due to thecentrifugal force so that the excess treatment medium can be led off tothe outside from the treatment chamber.

Since the treatment media are very expensive as a rule, it is endeavoredto collect the different treatment media used successively as separatelyas possible, to reprocess them where possible and then to recirculatethem into the treatment process for reuse. In this respect, it is thenalso endeavored, for environmental protection reasons alone, to collectthe used media separately in the treatment chamber if they cannot beused again.

Such an apparatus is described, for example, in U.S. Pat. No. 6,810,888B2.

The aforesaid apparatus in accordance with U.S. Pat. No. 6,810,888 B2 inthis respect substantially includes a rotatable holder for holding awafer as well as a nozzle arrangement which is provided above the waferand with which different liquids for the processing and treatment of thesurface of the wafer can be applied to the surface of the wafersuccessively from different nozzles. A system made up of a plurality ofconcentrically arranged ring chambers is provided around the holder forthe wafer for the separate collection of the liquids appliedsuccessively to the wafer in the treatment process. Each ring chamber inthis respect has a frustoconically designed run-off cone which isinclined in a manner dropping toward the ring chamber and in a divergingmanner so that, when the inner margin of the run-off once isapproximately at the level of the rotating wafer, the liquid moves overthe outer margin of the wafer onto the run-off cone and over the run-offcone into the provided ring chamber. The different liquids are thussuccessively collected separately in the different concentric chambersand can subsequently also be led off separately via outflow lines fromthe different chambers to the outside for reuse or for disposal.

To be able to supply the liquids to the different concentricallyarranged chambers successively, the run-off cones of the different ringchambers are differently designed and the different ring chambers areseparately displaceable in a vertical direction such that each run-offcone of each ring chamber can be successively placed with respect to thewafer by a suitable control of the vertical positions of the ringchambers such that the just used treatment liquid can be led off intothe provided ring chamber.

The holder for the wafer, the nozzle arrangement for the supply of thetreatment liquids and the system of the ring chambers are accommodatedin a hermetically closed process chamber so that the treatment of thewafers can also be carried out, for example, under a presettable gasatmosphere, for example under a specific process pressure or under aninert gas atmosphere, for example to suppress oxidation processes on thesurface of the wafer. Damaging, e.g. corrosive or toxic liquids are alsocommonly used so that the corresponding treatment steps can only becarried out in a closed environment for environmental and safetyreasons.

The ring chambers in which the liquids are collected are provided withflexible outflow lines which make a vertical movement of the ringchambers possible at all and via which the collected liquid can besupplied from the process chamber to a recycling system, for example.The motor for the drive of the wafer holder is also located outside theprocess chamber for obvious reasons. Indeed simply to prevent acontamination of the interior of the process chamber by the motor, butalso because the process chamber should be kept as small as possible fordifferent reasons well-known to the skilled person. The holder for thewafers is therefore set into rotation via a rotary axle by the outwardlydisposed motor.

The problem of the separate collection of the different treatment mediaused is thus admittedly solved by the apparatus in accordance with U.S.Pat. No. 6,810,888 B2 in principle. However, such apparatus have someconsiderable disadvantages.

An important disadvantage of these treatment apparatus known from theprior art is that all the ring chambers have to be moved to and fro in avertical direction to collect the different treatment materials usedsuccessively separately. It is here a complicated mechanical system ofconcentric chambers, which alone already have a considerable weighttogether with the liquids collected therein, which has to be moved in acumbersome manner by a vertically acting drive mechanism. The chamberswhich are concentrically disposed in one another furthermore have to beguided very precisely in one another and have to have a correspondingguide mechanism since it is otherwise possible that the concentric ringchambers wedge into one another on their relative vertical movement,which naturally also occurs and results in the standstill of the plant.The total plant must then be switched off to remedy such problems sincethe process chamber has to be opened. The negative consequences of sucha stop are obvious. Due to the guide mechanism for realizing a reliablevertical movement of the total ring chamber system, the ring chambersystem with the guide mechanism and the vertical drive mechanism isrelatively large overall, which is contrary to the demand for a processchamber volume which is as small as possible.

Since the ring chambers are displaceable in total in the verticaldirection, as already mentioned, the outflow lines must be made asflexible lines. The flexible outflow lines are accordingly under astrong mechanical load due to the constant vertical movement to and froof the ring chambers. The flexible outflow lines must therefore be madefrom expensive, highly loadable material since a bursting of the outflowlines in the interior of the process chamber has to be prevented underall circumstances. Particularly the outflow lines have to be monitoredand serviced correspondingly often, which is in turn associated with acorresponding effort and/or cost.

Further serious disadvantages are due to the drive system. Since thedrive motor, as described above, has to be provided outside the processchamber, the drive of the wafer holder takes place via a drive axlewhich has to be sealingly journalled in a leadthrough in the base of theprocess chamber. Such seals generally have the problem that they alwaysgive off at least small quantities of abrasive or very fine quantitiesof lubricant and thus also give them off into the process chamber. Sincethis has to be prevented at all costs, the corresponding leadthroughsfor the drive axle not only have to be extremely gastight, but alsoencapsulated in a correspondingly complex and/or expensive manner. Sincea contamination of the chamber interior cannot be completely preventedeven with the largest technical effort, the process chamber isfrequently exposed to an overpressure of a process gas so that theprocess gas urges the contaminants to the outside via the seals andthereby does not allow them to penetrate into the process chamber. Thisis naturally associated with a high effort and/or expense simply toprovide the process gas under the required overpressure. On the otherhand, there are processes which preferably have to be carried out at anunderpressure. Such processes can then not be carried out using a plantin accordance with U.S. Pat. No. 6,810,888 B2 since the process chamberwould be contaminated via the leadthrough of the drive axle from theoutside and by abrasive or lubricant from the seal if it is operated atan underpressure with respect to a pressure present outside the processchamber.

Apparatus in accordance with U.S. Pat. No. 6,810,888 B2 are generallyalso not usable for cases in which the wafer should rather be installedsuspended beneath the holder for processing for technical processreasons or for other reasons, for example, since the drive axlenaturally does not allow such an arrangement of the wafer at the holderfor purely geometrical reasons. The wafer must generally be installedlying, at the top at the holder on the side disposed opposite the driveaxles in the process chamber.

A further disadvantage is that the arrangement demands a lot of spacewith regard to the axial direction. This is a disadvantage, inparticular when apparatus should be operated, for example in a cleanroom, which should be kept as small as possible for known advantageousreasons, especially naturally also because a corresponding surroundingatmosphere has to be maintained which requires a correspondinglyelaborate design from an apparatus aspecthaving exhaust systems, filtermeans, pumps possible means for creating a protective gas atmosphere inthe clean room and so forth. The larger the clean room is the moreelaborate the aforementioned means for the operation of the clean roomhave to be designed and the more elaborate and expensive thecorresponding operation of the clean room also becomes.

BRIEF SUMMARY OF THE INVENTION

Starting from the prior at, it is therefore an object of the inventionto propose a treatment apparatus for treating a surface of a body withat least two different treatment media, in particular for treating adisk-shaped wafer which allows the different treatment media used to becollected separately and specifically to be resupplied to the treatmentprocess for reuse. In this respect, problems with the ring chambersmovable in the vertical direction known from the prior art should beavoided. The treatment apparatus should be flexible and simple in use,and in particular permit a simple and reliable exchange, automated wherepossible, of the bodies to be treated.

The problems known from the prior art with the leadthroughs of the drivemotors should also be solved by the invention by specific embodiments sothat a hermetic sealing of the treatment chamber is possible in asimpler and safer manner and the body to be treated should be able to beinstalled either beneath or above a rotatable holder. Furthermore, thetreatment apparatus should be carried out as space saving as possible sothat this takes up as little space as possible.

The subjects of the invention satisfying these objects are characterizedby the features of independent claim 1.

The dependent claims relate to particularly advantageous embodiments ofthe invention.

The invention relates to a treatment apparatus for treating a surface ofa body with a first treatment medium and a second treatment medium. inthis respect, the treatment apparatus includes a holding devicerotatable about an axis of rotation for receiving and holding the bodyand a rotary drive rotationally fixedly coupled to the rotatable holdingdevice as well as a supply device for supplying the first treatmentmedium and the second treatment medium to the surface of the body heldin the holding device. The treatment apparatus includes a collectioncontainer having a separation element, which separation element dividesthe collection container into a first chamber and into a second chambersuch that the first treatment medium can be collected in the firstchamber and the second treatment medium separately in the secondchamber. In accordance with the invention, the collection containerincludes a base chamber part not movable with respect to the holdingdevice and the separation element is movably arranged between a firstposition and a second position such that the first treatment medium canbe led off into the first chamber in the first position and the secondtreatment medium can be led off into the second chamber in the secondposition.

It is thus essential to the invention that the collection container,specifically made as a ring chamber, has a base chamber part which isnot displaceable with respect to the holding device. The collectioncontainer of the present invention is thus not a collection containercomposed of a plurality of concentric ring chambers as is known from theabove-described prior art, but the collection container of the presentinvention is rather a fixed, non-displaceable collection container whichincludes a plurality of chambers for the separate collection of thedifferent treatment media. It is not the ring chamber in total which ismovable here, but rather only the one separation element or theplurality of separation elements present, wherein the separation elementis arranged movable between a first position and a second position suchthat the first treatment medium can be led off into the first chamber inthe first position and the second treatment medium can be led off intothe second chamber in the second position.

A plurality of serious disadvantages of the apparatus known from theprior art are thereby remedied at the same time. Since the collectioncontainer is a single, integral collection container which is no longerformed from a plurality of concentric ring chambers which are movablewith respect to one another and which each singly have to be moved toand fro in the vertical direction to be able to collect the differenttreatment media used successively separately, all complicated mechanismscan be dispensed with. The collection container in accordance with theinvention does not have to be moved together with the liquid collectedtherein. Instead, only the much lighter separation elements, which aremuch easier to guide, have to be moved which moreover do not have to beguided directly with respect to one another like the concentric ringspaces in the prior art. The demands on the precision of the verticalguide mechanism are thereby a lot smaller, the structure is less complexand thus less expensive, less prone to disturbances and lessmaintenance-intensive than the complicated structure with verticallymovable concentric ring spaces.

Since the collection container in accordance with the invention, unlikethe ring chambers in the prior art, are not displaceable in total in thevertical direction, but rather have a fixed vertical position, noproblematic flexible output lines with the initially described problemshave to be used either. Relatively inexpensive and robust, non-flexiblelines, for example, lines made from suitable metals or suitable plasticscan rather be used as the drain lines for leading off the treatmentmedia from the chambers.

As will be described in more detail further below, the inventiondevelops further very substantial advantages if, in a specificembodiment, instead of a conventional drive such as in already describedin principle e.g. in U.S. Pat. No. 6,810,888 B2, a bearingless motor isused which is, however, not compulsory for the present invention.

In practice, the non-displaceable base chamber part will include achamber bottom through which the first treatment medium and the secondtreatment medium can be led from the collection container, canpreferably be led off via rigid outflow lines.

The separation element can in this respect in principle be displaced byany suitable mechanism between the first position and the secondposition. In a first embodiment, the separation element is movable bymeans of a connecting rod between the first position and the secondposition. The connecting rod can in this respect be moved in a mannerknown per se, for example by means of a linear motor, by means of ahydraulic or pneumatic piston, via a gear or any in any other suitablemanner by a drive between the first position and the second position.

In another embodiment, the separation element can be made movable bymeans of a spindle between the first position and the second position.The separation element can thus, for example, have an internal threadinto which a threaded bar engages so that the separation element isdisplaceable between the first position and the second position byrotation of the threaded bar.

A stretchable bellows is preferably provided at the separation elementso that the separation element is movable between the first position andthe second position by means of the stretchable bellows. For thispurpose, the stretchable bellows can have a pressurized fluid, forexample air or oil, applied to it in a manner known per se to generate amovement in a first direction. The opposite movement can then begenerated, for example, in that the bellows is made so that it is underan elastic fore in the opposite direction so that on the relief ofpressure the movement in the opposite direction is automaticallygenerated.

The separation element itself can naturally also be formed from aflexible wall in a presettable region or can include a flexible sectionso that a movement can be generated between the first position and thesecond position by stretching or compressing the flexible wall or theflexible section.

In an embodiment particularly important for practice, the rotatableholding device is provided in a process chamber which is preferably ahermetically closable process chamber and can, for example, have aprocess gas and/or a presettable process pressure applied to it.

Very particularly preferably, the rotary drive itself, that is the motorfor driving the holding device, is provided within the process chamber.

As already mentioned further above, the rotary drive in an embodimentparticularly important for practice is a magnetically journalled motor,in particular a bearingless motor, including a stator and a rotorcontactlessly magnetically journalled with respect to the stator. Inthis respect, the rotor of the rotary drive advantageouslysimultaneously forms the holding device. In this respect, the rotor isin practice frequently made as a more or less narrow ring and the rotorcan advantageously be permanently magnetic. In this respect, the statoris particularly preferably provided outside the process chamber, wherebyspace can substantially be saved in the process chamber, on the onehand. On the other hand, the rotatingly driving part of the rotarydrive, namely the rotor of the rotary drive, lies completely in theinterior of the process chamber, whereas all the other parts of therotary drive, in particular the stator with all the necessary electricalconnections and control devices, lie outside the process chamber withouta mechanical connection or an electrical line connection being necessarybetween the driving rotor and the part of the rotary drive lying outsidethe process chamber.

In this specific embodiment, the invention develops further substantialadvantages.

Since the actual rotary drive, namely the rotor of the bearinglessmotor, lies completely within the process chamber and, apart from themagnetic drive field generated by the stator, no physical connection isnecessary from the rotor to outside the process chamber, a leadthroughin the bottom of the process chamber, in which a drive axle has to besealingly journalled, is also no longer necessary. The bearingless motorof the present invention, which is known as such per se to the skilledperson, namely manages completely without a drive axle. Theabove-described problems with the seals or with abrasive or the givingoff of very fine quantities of lubricant from the bearing can thus notoccur at all since bearings are no longer necessary. The process chambercan thus be hermetically closed in a simple manner in the operatingstate. A contamination of the chamber interior can thus be practicallycompletely prevented without any larger technical effort. The processchamber therefore also no longer necessarily has to be exposed to anoverpressure of a process gas. Processes which preferably have to becarried out under an underpressure can also be carried out withoutproblems in a treatment apparatus in accordance with the invention sinceleaking leadthroughs through which gas could penetrate from the outsideinto the process chamber are no longer present.

In particular, then when an especially space saving compact design isrequired the stator can also be arranged within the process chamber.Advantageously the stator is then arranged within the moveableseparation elements. For protection of the stator against the treatmentmedia which can, for example be physically or chemically aggressivesubstances, such as acids, alkaline solutions or also abrasively actingmedia, or media which are present at an increased temperature, thestator is advantageously encapsulated, preferably completelyencapsulated, for example with PTFE, Teflon, PVC, stainless steel, orany other protective material. When the stator of the bearingless engineis arranged within the process chamber this automatically has severaladvantages. On the one hand, the air gap between the rotor and thestator can be minimized, whereby an effective electromagnetic couplingbetween the rotor and the stator can be achieved.

A further important advantage is that such a stator arranged in theinterior of the process chamber takes up comparatively little space withregard to the axial direction. This means the drive motor isextraordinarily flat and a plurality of process chambers can be readilystacked on top of each other in a very compact manner, as the drivemotor has no components which project beyond the process chamber in theaxial direction. The drive motor also does not take up additional spacebeyond the process chamber in the radial direction, as it is arrangedcompletely within the process chamber with all components. This is ofparticularly beneficial advantage when the treatment apparatus inaccordance with the invention should, for example, be operated in aclean room which should advantageously be kept as small as possible asalready mentioned. By making use of a treatment device in accordancewith the invention having a stator arranged within, without a problem aplurality of different process chambers can simultaneously be arrangedwithin a clean room and can, for example be stacked, with the demand ofspace for the installation of the process chambers being reduced withinthe clean room. These previously described advantages are only fullypossible with a bearingless motor in accordance with the presentinvention, whose stator is arranged within the process chamber.

In practice, a treatment apparatus in accordance with the invention willfrequently be used for treating a disk, in particular a wafer, formanufacturing microelectronic components. Examples of treatmentprocesses important for practice are named here as representatives forfurther possible processes: chemical-mechanical planarization (CMP), thecleaning and/or corroding of wafers or the removal of photoresist withsolvents, also called polymer removal, such as are e.g. mainly, but notonly, used in the semiconductor industry.

If a bearingless motor is used as the drive, the wafer can, for example,alternatively also be installed suspended beneath the holder forprocessing since a disturbing drive axle is no longer present. The waferthus generally no longer has to be installed lying, at the top at theholder on the side disposed opposite the drive axle in the processchamber.

In industrial practice, a treatment apparatus of the present inventionwill include a manipulator, in particular a program controlled robotunit, for automatically changing the body, wherein a plurality ofindividual treatment chambers is preferably provided, whereinadvantageously one single manipulator and only some few manipulators areprovided to place the wafers automatically and in a program controlledmanner into the treatment apparatus or to remove them from them.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A shows a first embodiment with a bearingless motor with anoutflow of the first treatment medium into the first chamber.

FIG. 1B shows the embodiment in accordance with Fig. 1a with an outflowof the second treatment medium into the second chamber.

FIG. 2 shows a second embodiment with three chambers.

FIG. 2A shows a further embodiment in accordance with FIG. 2A with atwo-side medium application.

FIG. 3A shows a separation element driven by means of a linear motor.

FIG. 3B shows a section in accordance with FIG. 3A along the line A-A.

FIG. 4 shows a separation element driver by means of a spindle.

FIG. 5 shows a separation element drive by means of bellows.

FIGS. 6A-6D shows a processing sequence with a wafer installed in alying position.

FIGS. 7A-7D shows a processing sequence with a wafer installedsuspended.

DETAILED DESCRIPTION OF THE INVENTION

Before the essential aspects of the invention is looked at in moredetail in the following with reference to specific embodiments, thefunction of the bearingless motor should first be briefly explained asit is shown by way of example and schematically in the followingFigures.

Within the framework of this application, a bearingless motor is to beunderstood as a motor which forms an electromagnetic rotary drive andwhich includes a magnetic rotor, preferably a permanent magneticallyexcited rotor, and a stator, wherein the rotor is journalled in acontactless manner by means of magnetic forces. The characteristic whichgives the bearingless motor its name is that is does not have anyseparate magnetic bearing for the rotor. For this purpose, the stator isdesigned as a bearing stator and drive stator and the rotor as apassively magnetic rotor which serves both as a bearing rotor and as adrive rotor. The stator is designed or is provided with electricwindings such that it generates an electromagnetic rotary field which,on the one hand, exerts a torque onto the rotor which drives itsrotation about the axis of rotation and which, on the other hand, exertsa transverse force which can be set as desired onto the rotor so thatits radial position with respect to a plane perpendicular to the axis ofrotation can be preset or actively controlled. In the operating state,the rotor is thus actively controllable or drivable by means of theelectric windings of the stator with respect to three degrees offreedom, namely the rotation about the axis of rotation and the radialposition in the plane perpendicular to the axis of rotation (two degreesof freedom).

With respect to three further degrees of freedom, namely tilts withrespect to the plane perpendicular to the axis of rotation (two degreesof freedom) and the axial position, the rotor is passively magnetic inthe bearingless motors known from the prior art, that is it isstabilized by reluctance forces in a non-controllable manner. The rotoris thus both drivable and journallable in a contactless manner in theoperating state by the magnetic interaction between the bearing/drivestator and the rotor without separate magnetic bearings being presentfor this purpose.

The term “bearingless motor with magnetic rotor” is to be understood inthis sense within the framework of this application. With respect tofurther details of the embodiment and of the control or regulation ofthe bearingless motor, reference is made here e.g. to EP 0 986 162 or toWO-A-96/31934 in which such a bearingless motor is disclosed for theexample of a rotary pump. Reference is in particular also made in thisconnection to WO 2009/132707 A1 which discloses a bearingless motor witha ring rotor such as can preferably be used in the present invention.

In this respect the rotor can inter alia be made in the form of acompact disk or also as a ring, that is with a cut-out at the center. Arotor made as a ring is also particularly preferably used in the presentinvention. In particular with large rotors, the embodiment of the rotoras a ring above all has the advantage, in addition to its specificmagnetic properties, that such an annular rotor naturally has much lessweight than a disk-shaped rotor with the same outer dimensions because asubstantial quantity of material is saved by the cut-out at the centerof the rotor in the annular rotor. In another respect, it is alsopossible on the use of an annular rotor to apply a treatment medium tothe body supported by the annular rotor, specifically a wafer, formanufacturing microelectronic components, successively or simultaneouslyfrom both sides, such as is shown schematically, for example, in FIG. 2Awith respect to a special embodiment.

FIGS. 1A and 1B show in a schematic representation a first embodiment ofa treatment apparatus 1 in accordance with the invention having abearingless motor 6. In this respect, FIG. 1A differs from FIG. 1B onlyin that in accordance with FIG. 1A the first treatment medium 32 is ledinto the first chamber 81 in a first workstep, whereas in FIG. 1A thefirst method step is already concluded and a second method step is shownin which an outflow of the second treatment medium 32 into the secondchamber 82 is just being shown.

The specific embodiment of a treatment apparatus 1 in accordance withthe invention for treating a surface 21 of a body 2 with a firsttreatment medium 31 and a second treatment medium 32 includes a holdingdevice 5 rotatable about an axis of rotation 4 for receiving and holdingthe body 2 which in the present example is a wafer 2 for manufacturingmicroelectronic components. The treatment device 1 further includes arotor 61 of the rotary drive 6, said rotor being rotationally fixedlycoupled to the rotatable holding device 5, as well as a supply device 7which is made in the form of a nozzle pair 7 in the embodiment of FIG.1A and FIG. 1B, and which is provided for supplying the first treatmentmedium 31 and the second treatment medium 32 to the surface 21 of thebody 2 held in the holding device 5. In this respect, the treatmentapparatus 1 further includes a collection container 8 with a separationelement 80 at which a respective run-out cone 83 is provided. Theseparation element 80 with the run-out cone 83 divides the collectioncontainer 8 into a first chamber 81 and into a second chamber 82 suchthat the first treatment medium 31 can be collected in the first chamber81 and the second treatment medium 32 can be collected separately in thesecond chamber 82.

The treatment apparatus 1 in this respect includes in a manner known perse a process chamber in which at least the rotor 61 of the bearinglessmotor with the wafer 2, the supply device 7 and the collection container8 are accommodated, whereas the stator 62 is preferably arranged, asshown in the Figures, outside the process chamber. For reasons ofclarity, the explicit representation of the process chamber was omittedin the Figures.

In this respect, the run-out cones 83 at the separation element 80 areadmittedly advantageous, but not absolutely necessary. If, for example,the wafer is rotated at a very high speed, it is also possible that theliquid 31, 32 hurled away from the wafer is generally hurled up to theseparation element 80 furthest away and therefore automatically lands inthe correct chamber 81, 82 even without a run-out cone 83 if only theheight of the separation elements 80 is suitably selected.

In accordance with the invention, the collection container 8 includes abase chamber part 800 not displaceable with respect to the holdingdevice 5 and having a chamber bottom 801, and the separation element 80with the run-out cone 83 is arranged movable between a first position Aand a second position B such that A in accordance with FIG. 1A the firsttreatment medium 31 can be led off into the first chamber 81 in thefirst position and B in accordance with FIG. 1B the second treatmentmedium 32 can be led off into the second chamber 82 in the secondposition.

To be able to supply the treatment media 31, 32 to the twoconcentrically arranged chambers 81, 82 after one another, the run-outcones 83 of the different separation elements 80 are designeddifferently and the separation elements 80 are separately displaceablein the vertical direction along the axis of rotation 4 in accordancewith the representation such that each run-out cone 83 of each camera81, 82 can be placed by a suitable control of the vertical positions ofthe separation elements 80 after one another with respect to the wafersuch that the just used treatment medium 31, 32 can be led off into theprovided chamber 81, 82.

So that the treatment media 31, 32, which are often very expensive, canbe reused, the chambers 81, 82 are connected via lines to a recyclingplant which is made up of two collection tanks V in which the firsttreatment medium 31 and the second treatment medium 32 are collectedseparately, are supplied from there in each case to a pump P whichsupplied the two treatment media 31, 32, separately in each case, to afilter F and to a heater H from where the treatment media 31, 32processed in this manner again are supplied for reuse to the supply line7 again.

It is self-explanatory in this respect that the invention is notrestricted to treatment apparatus 1 with which only two differenttreatment media 31, 32 can be separately collected. A second embodimentin accordance with FIG. 1A and FIG. 1B respectively having threechambers is thus shown schematically with reference to FIG. 2 with whichthree different treatment media can be separately collected. The skilledperson immediately understands how the treatment chamber 1 is to bemodified so that four or even more different treatment media can also beseparately collected.

It is also possible, as already mentioned further above, that the wafer2 has the treatment medium 31, 32 applied from both sides and isprocessed on both sides. This is possible in accordance with FIG. 2A inthat an annular rotor 61 is used, wherein a further supply device 70, inaddition to the supply device 7 which is above the wafer 2, is arrangedbeneath the wafer 2 on the oppositely disposed side. A furthercollection container is preferably provided in this respect forcollecting the treatment medium 31, 32 applied to the wafer 2 frombelow, said further collection container not being shown explicitly inFIG. 2A for reasons of clarity. This means, when an annular rotor 61 isused, it is also possible to apply a treatment medium 31, 32 to the body2 supported by the annular rotor 61, specifically a wafer 2, formanufacturing microelectronic components, successively or simultaneouslyfrom both sides, as is shown by way of example in FIG. 2A with referenceto a specific embodiment.

The displacement of the separation element 80 between position A andposition B can in this respect be technically realized in any suitablemanner. Only some possible technical solutions are outlined by way ofexample with reference to FIG. 3A and FIG. 3B respectively and to FIG. 4and FIG. 5. The skilled person immediately understands that othersolutions of equal effect are also possible and are also covered by thepresent invention.

In the example of FIG. 3A and FIG. 3B respectively, which shows asection along the line A-A in accordance with FIG. 3A, an embodiment isshown in which the separation element 80 is driven, for example, bymeans of a linear motor not shown explicitly. The chamber 81 shown isbounded by the fixed chamber wall 8100 and the chamber 82 is bounded bythe fixed chamber wall 8200 in the vertical direction in accordance withthe illustration. The connecting rod 84 is arranged between the chamberwalls 8100 and 8200, is drivable via the linear motor, not shown, and isconnected to the run-off cone 83 such that the separation element 80together with the run-off cone 83 is displaceable between position A andposition B by means of the connecting rod 84.

A similar solution is shown with respect to FIG. 4 in which noconnecting rod 84 is provided for displacing the separation element 80,but rather a spindle 85 having an external thread and cooperating withan internal thread which is provided in a borehole 87 of the separationelement 80. The spindle 85 is in this respect rotationally fixedlyconnected to a rotary drive, not shown explicitly, so that theseparation element 80 can be pushed into position A by rotating thespindle 85 in one of the two directions and can be pushed into positionB by rotating the spindle 85 in the opposite direction.

In accordance with FIG. 5, there is also the possibility of moving theseparation element 80 to and fro between position A and position B bymeans of a bellows 86. If the bellows 86 is exposed to a pressure D, forexample, to compressed air under pressure B, the elastic bellows 86 isextended in a manner known per se and the separation element 80 ispushed with the run-off cone 83 upwardly into position A in accordancewith the illustration. If the interior of the bellows is again relievedof the pressure D, the bellows previously elastically stretched by thepressure D contracts again back to its position of rest, whereby theseparation element 80 is conveyed back into position B.

Finally, another respective complete processing sequence is shownschematically with reference to FIG. 6A to 6D and to FIG. 7A to 7Drespectively for processing a wafer 2 in a processing apparatus 1 inaccordance with the invention.

In this respect, the processing sequence of FIG. 6A to FIG. 6B onlydiffers from that of FIG. 7A to FIG. 7B in that in the embodiment ofFIG. 6 a processing apparatus is used in which the wafer 2 is arrangedin a lying position, that is above the rotor 61 in accordance with theillustration, whereas the wafer 2 in the example of FIG. 7 is arrangedsuspended, that is beneath the rotor in accordance with theillustration.

In a first processing step (FIG. 6A and 7A respectively), the wafer 2 isfirst treated by a first processing medium which is led off into theinner chamber in accordance with the illustration. For this purpose, allthe separation elements 80 with the run-off cone 83 are in position A.In accordance with FIG. 6B and FIG. 7B respectively, the innermostseparation element 80 with the run-off cone 83 is then displaced intoposition B so that in a second processing step the second processingmedium is led into the center chamber.

FIG. 6C and FIG. 7C respectively finally show a final third workstep inwhich the wafer 2 is coated with a third processing medium, e.g. with alacquer. For this purpose, the two innermost separation elements 80 arein the lower position B so that the third coating medium is led off intothe outermost chamber in accordance with the illustration.

In FIG. 6D and FIG. 7D respectively all the separation elements 80 withthe run-off cone 83 are in the lower position B. This allows a robot Mautomatically to remove the completely processed wafer 2 from the nowopen process chamber (not shown) and to load the process chamber with anew wafer 2 for a next complete processing sequence.

It is understood that all the above-described embodiments of theinvention are only to be understood as examples or by way of example andthat the invention in particular, but not only, includes all suitablecombinations of the described embodiments.

What is claimed is:
 1. A treatment apparatus for treating a surface of abody, comprising: a first treatment medium and a second treatmentmedium, wherein the treatment apparatus includes a holding devicerotatable about an axis of rotation for receiving and holding the body,a rotary drive rotationally fixedly coupled to the rotatable holdingdevice, and a supply device for supplying the first treatment medium andthe second treatment medium to the surface of the body held in theholding device, wherein the treatment apparatus further includes acollection container having a separation element, in which theseparation element divides the collection container into a first chamberand a second chamber such that the first treatment medium can becollected in the first chamber and the second treatment medium can beseparately collected in the second chamber, wherein the collectioncontainer includes a base chamber part not displaceable with respect tothe holding device, and the separation element is movably arrangedbetween a first position (A) and a second position (B), such that thefirst treatment medium can be led off into the first chamber in thefirst position (A), and the second treatment fluid can be led off intothe second chamber in the second position (B).
 2. The treatmentapparatus according to claim 1, wherein the non-displaceable basechamber part includes a chamber bottom through which the first treatmentmedium and the second treatment medium can be led off from thecollection container.
 3. The treatment apparatus according to claim 1,wherein the separation element is movable by means of a connecting rodbetween the first position (A) and a second position (B).
 4. Thetreatment apparatus according to claim 1, wherein the separation elementis movable by means of a spindle between the first position (A) and asecond position (B).
 5. The treatment apparatus according to claim 1,wherein the separation element is movable by means of a stretchablebellows between the first position (A) and a second position (B).
 6. Thetreatment apparatus according to claim 1, wherein the separation elementis formed in a presettable region of a flexible wall.
 7. The treatmentapparatus according to claim 1, wherein the rotatable holding device isprovided in a process chamber.
 8. The treatment apparatus according toclaim 1, wherein the rotary drive is provided within the processchamber.
 9. The treatment apparatus according to claim 1, wherein therotary drive is a bearingless motor including a stator and a rotormagnetically journalled in a bearingless manner with respect to thestator, wherein the bearingless motor is designed preferably having thestator and the rotor within the process chamber
 10. The treatmentapparatus according to claim 9, wherein the rotor forms the holdingdevice.
 11. The treatment apparatus according to claim 9, wherein therotor is made as a ring.
 12. The treatment apparatus according to claim9, wherein the rotor is permanently magnetic.
 13. The treatmentapparatus according to claim 9, wherein the stator is provided outsidethe process chamber.
 14. The treatment apparatus according to claim 1,wherein the body is a disk, in particular a wafer, for manufacturingmicroelectronic components.
 15. The treatment apparatus according toclaim 1, wherein a manipulator (M), in particular a program-controlledrotor unit, is provided for the automatic changing of the body.